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Microsensors, MEMS, and Smart Devices by Julian W. Gardner Details

Microsensors and MEMS (Microelectromechanical Systems) are revolutionizing the semiconductor industry. The micro-system or so-called "on-chip system" combines microelectronic circuits with microsensors and micrometers. This emergency field has witnessed the development…

Microsensors, MEMS, and Smart Devices synopsis

Microsensors and MEMS (Microelectromechanical Systems) are revolutionizing the semiconductor industry. The micro-system or so-called "on-chip system" combines microelectronic circuits with microsensors and micrometers.

This emergency field has witnessed the development of applications ranging from electronic nose and smart ear to small forceps and modern jet jet. This unique reference provides a complete overview of microosensor technologies, and addresses the issues of dynamic integration for the successful application of micro-amplifiers, MEMS and smart devices. Features include: aeo review of traditional and emerging manufacturing processes including micromachining bulk and silicon, micro-printing methods and miniature polymer processing methods.

aeo focus on the use of IDT microsensors (interdigital) in the development of low-power budget, MEMS or wireless micromachines. aeo cover katest applications in smart devices including nose, e-tongue and finger, along with smart sensors and strcutures such as smart skin.

aeo Overview of smart sensor development through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. aeo comprehensive supplements that identify the characteristics of biomedical MEMS materials, relevant websites and a directory of key organizations active in this area.

Microsensors, MEMS, and Smart Devices provide readers with ways to understand and evaluate micro systems. Advanced students, microelectronics researchers, engineers and developers of micro-sensor systems will find this reading necessary for comprehensive processing.

Detailed coverage of material characteristics makes this work an important reference for mechanical engineers, physicists and material scientists working in this field.



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